European Commission - Internal Market, Industry, Entrepreneurship and SMEs

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FAU - Industrial Services in Crystal Growth of SiC

Organisation

Upper Organization: Friedrich-Alexander-Universität Erlangen-Nürnberg

Type: Academic Institution

 

Address

Dr.-Mack-Straße 77
90763 Fürth
Germany
 

Contacts

 

 
Peter WELLMANN
This is the SME contact person

Key Enabling Technologies Activities

Electronic and optical functional materials
Power electronics
Dual-use Activities: 
Yes

Technology Readiness Levels

TRL 3: Experimental proof of concept
TRL 4: Technology validated in lab
TRL 5: Technology validated in relevant industrial environment
TRL 6: Technology demonstrated in relevant industrial environment

Market Sectors

Energy
Production technology (machinery / equipment / automation)

Description

The Crystal Growth Lab at the Materials Department 6 (University of Erlangen-Nürnberg) offers in conjunction with the University Knowledge and Technology Transfer Office services for industrial partners in the field of high temperature crystal growth & technology.

  • R & D contracts
  • growth machine design & prototyping
  • process development
  • support / consulting of industrial crystallization
  • training of industrial staff

In particular, high temperature crystal growth and epitaxy of wide band-gap semiconductors like silicon carbide and related materials belong to the key competences.

Contact: crystals@fau.de

Lab information: Prof. Dr.-Ing. Peter Wellmann, Crystal Growth Lab, Materials Department 6, Friedrich-Alexander-Universität Erlangen-Nürnberg, Dr.-Mack-Str. 77, 90763 Fürth, Germany

Equipment

Equipment (complete processing chain to prepare SiC wafers from SiC source materials):

  • 5 x PVT reactors (physical vapor transport growth of SiC boules, T = 1600 °C ... 2500 °C)
  • 1 x AIXTRON CVD reactor (chemical vapor deposition of SiC on Si)
  • various ovens for crystal annealing / heat treatment
  • 1 x grinding machine (preparation of boule cylinders and flats)
  • 1 x multi-wire-saw
  • 3 x polishing machines
  • various optical, electrical and spectroscopic characterization equipment for semiconductor wafer material inspection (for more details please see "services")

Services

OVERVIEW

  • R & D contracts
  • growth machine design & prototyping
  • process development
  • support / consulting of industrial crystallization
  • training of industrial staff

 

in DETAIL

MACHINE TECHNOLOGY

design & prototyping of industrial growth furnaces

  • 4 inch & 6 inch

process automation

in-situ growth monitoring tools

  • 2D/3D low dose x-ray visualization

 

PROCESSING

bulk single crystal SiC growth

  • 4H-/6H-SiC  (3 inch, 4 inch, 6 inch in development)
  • 15R-/3C-SiC (small pieces)

R & D contracts on SiC crystal growth

  • SiC seed development
  • doping (Al, B, N, P)
  • anything special / non-standard

SiC powder synthesis & test

  • validation for PVT bulk growth

3C-SiC epitaxy on Si

high temperature crystal growth

  • melt temperature up to 2700°C

thin films from PVD processing and

nano-particulate ink deposition

 

MATERIALS TESTING

electrical

  • resistance measurements  
  • Hall mobility & charge carrier density

optical

  • photoluminescence (-topography)
  • cathodoluminescence (-topography)
  • optical absorption topography
  • UV-VIS-IR-Absorption
  • Raman spectroscopy, FTIR

structural

  • scanning electron microscopy
  • x-ray analysis
  • surface analysis , confocal microscopy

“chemical”

  • differential scanning calorimetry
  • energy dispersive x-ray fluorescence

 

TRAINING COURSES FOR INDUSTRIAL STAFF

  • crystal growth schools with theoretical and practical training
  • teaching language English, on demand translation into other languages may be provided
Service for Industry and SMEs: 
Yes