The assembly of nano, micro or mesoscale systems and components with dimensions between 1 µm to 1 mm. Because of the need for precision on a microscale, micro assemblies require reliable visual alignment equipment, such as ion beam imaging systems and stereo electronic microscopes, as well as precision tools and machines, such as microgrippers. The microsystems are assembled according to techniques of doping, thin films, etching, bonding, microlithography, and polishing.

Alternative label

  • micro-fabrication methods

  • micro-fabrication

  • techniques of microfabrication

  • techniques of micro-fabrication

  • assembly of mesoscale systems

  • assembly of microscale systems

  • microfabrication methods

  • assembly of nanoscale systems

  • microfabrication techniques

  • micro-fabrication techniques

Skill type

  • knowledge

Skill reusability level

  • cross-sector skills and competences

Essential skill/competence of

Optional skill/competence of



Concept URI