To overcome the power issue of current CMOS technology, the microelectronic industry needs radically new devices, which drastically improve the energy efficiency of microelectronic systems. One promising but largely unexplored technology is the use of nano-electromechanical (NEM) switches, which potentially achieve more than ten times improvement in energy efficiency. NEMIAC project ( aims to demonstrate the viability of this technology through the development of a competitive and manufacturable device, materials research to address the inherent reliability issue, and the development of tools and methodologies to build complex CMOS compatible logic based on the new NEM switch device.