This international event includes: •The RF-MST Cluster Meeting (July 1, 2013) co-organized with the European Commission, where the achievements of MEMS-related EU projects will be illustrated and discussed. •The MEMSWAVE Workshop (July 2-3, 2013) where invited and peer-reviewed papers will be presented to provide an international forum for scientists and industrialists for the exchange of information on the most recent advances and best achievements in the area of RF-MEMS, MSTs and RF-NEMS with emphasis on European achievements.