MEMSWAVE 2013 is the 14th edition of an international event to be held in Potsdam GERMANY (July 1-3, 2013). The series of MEMSWAVE started in 2000 in Sinaia ROMANIA and since 2004 has been promoted by AMICOM Network of Excellence on RF-MEMS and RF-Microsystems (MST), funded by the European Commission in FP6. The RF-MST Cluster Meeting (July 1, 2013) co-organized with the European Commission, where the achievements of MEMS-related EU projects will be illustrated and discussed.