Digital Single Market
Digital Economy & Society

ICT 2010

SMARTIEHS: Proof-of-Principle demonstrator of high speed inspection system for dynamic MEMS in wafer tests using micro-optical probing wafers.

This is a technology or research stand, located in Zone R2 - ICT inside. Stand number: R2-01

SMARTIEHS is the smart inspection system for high-speed and multifunctional testing of MEMS and MOEMS’ project focusing on microsystems.

The FP7 project SMARTIEHS is developing an inspection approach for wafer-based micro-electro-mechanical systems (MEMS) and optical MEMS, also known as MOEMS. This is an optical analogue approach as against the electronic probing cards which are normally used in the semiconductor industry. This exhibit demonstrates the SMARTIEHS system: it is based on micro-optical-probing wafers adapted to and aligned with the wafer under test. Two different probing wafers are being designed: a low coherent interferometer for shape and deformation measurements, and a laser interferometer for resonance frequency and mode shape measurements. Proof-of-principle demonstrators with five channels have been built for both interferometric principles and will be on the stand.

Technical description

Coordinator: Odd LØVHAUGEN (SINTEF, Norway)

Links and Documents

ID: 2903